Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques
H. Ehlers, S. Schlichting, C. Schmitz, and D. Ristau
Chinese Optics Letters , Vol.08 , Issue s1 , PP.62-66(2010)

Keywords(OCIS Code)
310.0310; 310.1860

Abstract
The challenge in rapid production of high-precision optical coatings is the need to realize a variety of complex coating designs in one process environment. Two approaches to enhance a stable deposition process are presented. First, a virtual deposition system is applied for a pre-selection of coating designs that result in increased process stability using optical broadband monitoring strategies. Second, optical broadband monitoring is combined with additional quartz crystal sensors to realize a hybrid process control for improving layer thickness accuracy. Finally, a successful combination of both approaches is demonstrated by comparative studies on virtual and real deposition processes.

©2003-2007 Chinese Optics Letters

View Full Text:PDF (3558 KB)

Original Manauscript:
Manuscript Accepted:2009-10-30
Revised Manuscript:
Published :


Column:
Note: The authors thank the German Federal Ministry of Economics and Technology (BMWi) for the financial support of the research project “TACo–Tailored Automated Coating” under contract No. 16IN0407 within the framework of the InnoNet Program. Furthermore, the assistance of the VDI/VDE Innovation + Technik GmbH is gratefully acknowledged.

References

1. D. Ristau, M. Lappschies, S. Schlichting, and H. Ehlers, Proc. SPIE 7101, 71010C (2008).

2. A. V. Tikhonravov and M. K. Trubetskov, Appl. Opt. 44, 6877 (2005).

3. D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, Appl. Opt. 45, 1495 (2006).

4. O. Stenzel, S. Wilbrandt, D. Fasold, and N. Kaiser, J. Opt. A 10, 085305 (2008).

5. M. Lappschies, B. G¨ortz, and D. Ristau, Appl. Opt. 45, 1502 (2006).

6. H. A. Macleod, Thin-Film Optical Filters (3rd edn.) (Inst. of Physics Pub., Bristol, 2001).

7. M. Lappschies, P. Pfeifer, U. Schallenberg, H. Ehlers, and D. Ristau, Proc. SPIE 7101, 71010P (2008).